Metalorganic chemical vapor deposition of metal oxide films exhibiting electric-pulse-induced resistance switching

被引：11
|
作者：
Nakamura, Toshihiro [1 ]
Homma, Kohei [1 ]
Yakushiji, Takashi [1 ]
Tai, Ryusuke [1 ]
Nishio, Akira [1 ]
Tachibana, Kunihide [1 ]
机构：
[1] Kyoto Univ, Dept Elect Sci & Engn, Nishikyo Ku, Kyoto 6158510, Japan
来源：
SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 22-23期
关键词：
MOCVD; resistance switching; resistance random access memory; manganite;
D O I：
10.1016/j.surfcoat.2007.04.090
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Pr1-xCaxMnO3(PCMO) films with the desired atomic composition were deposited on Pt/SiO2/Si substrates by metalorganic chemical vapor deposition (MOCVD) using in situ infrared spectroscopic monitoring. The I-V characteristics exhibited nonlinear, asymmetric, and hysteretic behavior in PCMO-based devices with top electrode of Al or Ti. The electric-pulse-induced resistance switching was observed in the PCMO-based devices. The resistance change was dependent on the Pr/Ca composition ratio of the PCMO films and the kind of the top electrodes. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：9275 / 9278
页数：4
相关论文
共 50 条
  • [1] Metalorganic chemical vapor deposition of magnetoresistive manganite films exhibiting electric-pulse-induced resistance change effect
    Nakamura, Toshihiro
    Tai, Ryusuke
    Tachibana, Kunihide
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (08)
  • [2] Electric-pulse-induced resistance switching in magnetoresistive manganite films grown by metalorganic chemical vapor deposition
    Nakamura, Toshihiro
    Homma, Kohei
    Tai, Ryusuke
    Nishio, Akira
    Tachibana, Kunihide
    IEEE TRANSACTIONS ON MAGNETICS, 2007, 43 (06) : 3070 - 3072
  • [3] Metalorganic chemical vapor deposition of magnetoresistive manganite films exhibiting electric-pulse-induced resistance change effect
    Nakamura, Toshihiro
    Tai, Ryusuke
    Tachibana, Kunihide
    Journal of Applied Physics, 2006, 99 (08):
  • [4] Resistive Switching in Metal Oxide Films Deposited by Metalorganic Chemical Vapor Deposition
    Nakamura, Toshihiro
    Onogi, Keita
    Homma, Kohei
    Tachibana, Kunihide
    EUROCVD 17 / CVD 17, 2009, 25 (08): : 865 - 869
  • [5] Mechanism of electric-pulse-induced resistance switching in manganites
    Quintero, M.
    Levy, P.
    Leyva, A. G.
    Rozenberg, M. J.
    PHYSICAL REVIEW LETTERS, 2007, 98 (11)
  • [6] Electric-pulse-induced reversible resistance in doped zinc oxide thin films
    Villafuerte, M.
    Heluani, S. P.
    Juarez, G.
    Simonelli, G.
    Braunstein, G.
    Duhalde, S.
    APPLIED PHYSICS LETTERS, 2007, 90 (05)
  • [7] Growth of metal oxide thin films by laser-induced metalorganic chemical vapor deposition
    Tokita, K
    Okada, F
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (12) : 7073 - 7083
  • [8] Metalorganic chemical vapor deposition of complex metal oxide thin films by liquid source chemical vapor deposition
    VanBuskirk, PC
    Bilodeau, SM
    Roeder, JF
    Kirlin, PS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (4B): : 2520 - 2525
  • [9] Electric-pulse-induced reversible resistance change effect in magnetoresistive films
    Liu, SQ
    Wu, NJ
    Ignatiev, A
    APPLIED PHYSICS LETTERS, 2000, 76 (19) : 2749 - 2751
  • [10] Electric-pulse-induced capacitance change effect in perovskite oxide thin films
    Liu, Shangqing
    Wu, Naijuan
    Ignatiev, Alex
    Li, Jianren
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (05)
12345