Frequency-comb-based interference microscope with a line-type image sensor

被引：13

作者：

Choi, Samuel ^{[1
]}

Shioda, Tatsutoshi ^{[1
]}

Tanaka, Yosuke ^{[1
]}

Kurokawa, Takashi ^{[1
]}

机构：

[1] Tokyo Univ Agr & Technol, Grad Sch Engn, Koganei, Tokyo 1848588, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 10A期

关键词：

optical frequency comb; microscope; image sensor; interferometry; profilometry; tomography;

D O I：

10.1143/JJAP.46.6842

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a frequency-comb-based interferometric microscope using a broadband comb light source and a line-type image sensor for proflometry and optical tomography. A waveguide-type frequency comb generator and wavelength equalizer were introduced to broaden the comb spectrum. In this paper, we demonstrate the surface profilometry of a coin and the observation of a cross-sectional tomography image of transparent glass. The three-dimensional images were captured using a line-type image sensor without any mechanical moving parts with a frequency interval variation of 25 GHz. The dynamic range in the depth direction was about 1.4 mm, and the measurement resolution was 35 pm. The standard deviation of seven thickness measurements was 5 mu m.

引用

页码：6842 / 6847

页数：6

共 9 条

[1] Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator [J].

Bitou, Y ;

Schibli, TR ;

Minoshima, K .

OPTICS EXPRESS, 2006, 14 (02) :644-654

[2]

CHOI S, 2006, P 12 MICR C MOC 06, P214

[3] Frequency-comb-based interferometer for profilometry and tomography [J].

Choi, Samuel ;

Yamamoto, Mitsufumi ;

Moteki, Daisuke ;

Shioda, Tatsutoshi ;

Tanaka, Yosuke ;

Kurokawa, Takashi .

OPTICS LETTERS, 2006, 31 (13) :1976-1978

[4] HIGH-REPETITION-RATE OPTICAL PULSE-GENERATOR USING A FABRY-PEROT ELECTROOPTIC MODULATOR [J].

KOBAYASHI, T ;

SUETA, T ;

MATSUO, Y ;

CHO, Y .

APPLIED PHYSICS LETTERS, 1972, 21 (08) :341-+

[5] Ultrahigh scanning speed optical coherence tomography using optical frequency comb generators [J].

Lee, SJ ;

Widiyatmoko, B ;

Kourogi, M ;

Ohtsu, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2001, 40 (8B) :L878-L880

[6] A new technique of optical ranging by a frequency-shifted feedback laser [J].

Nakamura, K ;

Miyahara, T ;

Yoshida, M ;

Hara, T ;

Ito, H .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (12) :1772-1774

[7] High-spatial resolution reflectometry by synthesis of optical coherence function for measuring reflectivity distribution at a long distance [J].

Saida, T ;

Hotate, K .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (04) :573-575

[8] Modulation characteristic of waveguide-type optical frequency comb generator [J].

Saitoh, T ;

Mattori, S ;

Kinugawa, S ;

Miyagi, K ;

Taniguchi, A ;

Kourogi, M ;

Ohtsu, M .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1998, 16 (05) :824-832

[9] A WAVE-GUIDE-TYPE OPTICAL-FREQUENCY COMB GENERATOR [J].

SAITOH, T ;

KOUROGI, M ;

OHTSU, M .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (02) :197-199

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