Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM)

被引:3
作者
Suda, M [1 ]
Nakajima, K [1 ]
Furuta, K [1 ]
Mitsuoka, Y [1 ]
Sakuhara, T [1 ]
Ataka, T [1 ]
机构
[1] SEIKO INSTRUMENTS INC,RES LAB ADV TECHNOL,MATSUDO,CHIBA 271,JAPAN
来源
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词
D O I
10.1109/MEMSYS.1996.493997
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:296 / 300
页数:5
相关论文
共 50 条
[41]   Advances in Crystallographic Image Processing for Scanning Probe Microscopy [J].
Moeck, P. ;
Bilyeu, T. ;
Koenig, A. Mainzer ;
Straton, J. .
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2014, 70 :C1607-C1607
[42]   Characteristics of low field-emission diamond films by scanning probe microscopy (SPM) [J].
Zhang, L ;
Sakai, T ;
Sakuma, N ;
Ono, T .
DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) :829-833
[43]   ADVANCED IMAGE-PROCESSING IN SCANNING PROBE MICROSCOPY [J].
URBAN, FK ;
ROMINE, P ;
ISLAM, MS .
THIN SOLID FILMS, 1994, 253 (1-2) :318-325
[44]   Scanning optical interferometry microscopy, using optical fiber probe [J].
Fatemi, H .
OPTIKA '98 - 5TH CONGRESS ON MODERN OPTICS, 1998, 3573 :247-251
[45]   A hybrid scanning probe microscope (SPM) module based on a DVD optical head [J].
Hwu, E-T ;
Illers, H. ;
Jusko, L. ;
Danzebrink, H-U .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (08)
[46]   Specialized probes with nanowhisker structures for scanning probe microscopy [J].
Zhukov, M. V. ;
Kukhtevich, I. V. ;
Levichev, V. V. ;
Mukhin, I. S. ;
Golubok, A. O. .
1ST INTERNATIONAL SCHOOL AND CONFERENCE SAINT-PETERSBURG OPEN 2014 ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES, 2014, 541
[47]   Modeling and calibration of micro/nano FBG temperature probe for scanning probe microscopy [J].
Liu, Zhenmin ;
Chen, Na ;
Li, Shaoying ;
Liu, Yong ;
Shang, Yana ;
Chen, Zhenyi ;
Pang, Fufei ;
Wang, Tingyun .
OPTICS EXPRESS, 2023, 31 (12) :19453-19462
[48]   Characterization of surface films formed in lubricated contacts by Raman microscopy and scanning probe microscopy (SPM) based methods [J].
Yabion, DG ;
Kalamaras, P ;
Webster, MN ;
Deckman, DE .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 226 :U258-U258
[49]   Metrology in scanning probe microscopy with atomic force microscopy and near-field scanning optical microscopy [J].
zurMuhlen, E ;
Munoz, M ;
Gehring, S ;
Reineke, F .
EUROPEAN JOURNAL OF CELL BIOLOGY, 1997, 74 :72-72
[50]   The potential of scanning electrochemical probe microscopy and scanning droplet cells in battery research [J].
Daboss, Sven ;
Rahmanian, Fuzhan ;
Stein, Helge S. ;
Kranz, Christine .
ELECTROCHEMICAL SCIENCE ADVANCES, 2022, 2 (04)