Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM)

被引：3

作者：

Suda, M ^{[1
]}

Nakajima, K ^{[1
]}

Furuta, K ^{[1
]}

Mitsuoka, Y ^{[1
]}

Sakuhara, T ^{[1
]}

Ataka, T ^{[1
]}

机构：

[1] SEIKO INSTRUMENTS INC,RES LAB ADV TECHNOL,MATSUDO,CHIBA 271,JAPAN

来源：

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年

关键词：

D O I：

10.1109/MEMSYS.1996.493997

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：296 / 300

页数：5

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