Development of an optical stylus displacement sensor for surface profiling instruments

被引：10

作者：

Fukatsu, H

Yanagi, K

机构：

[1] Tokyo Metropolitan Coll Technol, Shinagawa Ku, Tokyo 1400011, Japan

[2] Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata 9402188, Japan

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2005年 / 11卷 / 8-10期

关键词：

optical stylus; speckle noise; knife edge; profile method; surface texture;

D O I：

10.1007/s00542-005-0558-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The main cause of irrational results from measurements made with optical stylus instruments is speckle noise in the reflected light. To reduce or eliminate speckle noise, we developed a new optical stylus profiling system consisting of a displacement measuring part using a knife-edge and a speckle noise measurement part. Using this new system, we measured profiles of machined materials. The results show that the new system can eliminate speckle noise and can achieve a level of measurement accuracy as high as that of a contact stylus instrument.

引用

页码：582 / 589

页数：8

共 7 条

[1] Brodmann R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V802, P165, DOI 10.1117/12.967117
[2] BROWN AJC, 1992, P SOC PHOTO-OPT INS, V2008, P150
[3] CHUNLAN Y, 2000, P SOC PHOTO-OPT INS, V4221, P180
[4] HIGH-PRECISION OPTICAL-SURFACE SENSOR
KOHNO, T
OZAWA, N
MIYAMOTO, K
MUSHA, T
[J]. APPLIED OPTICS, 1988, 27 (01): : 103 - 108
[5] Mashimo K., 1993, Journal of the Japan Society of Precision Engineering, V59, P1091, DOI 10.2493/jjspe.59.1091
[6] IN-PROCESS SENSORS FOR SURFACE-ROUGHNESS AND THEIR APPLICATIONS
MITSUI, K
[J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1986, 8 (04): : 212 - 220
[7] ZHNG J, 1997, P IEEE INT C ROB AUT, P2801

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