Design and input-shaping control of a novel scanner for high-speed atomic force microscopy

被引：187

作者：

Schitter, Georg ^{[1
,2
]}

Thurner, Philipp J. ^{[2
]}

Hansma, Paul K. ^{[2
]}

机构：

[1] Delft Univ Technol, Delft Ctr Syst & Control, NL-2628 CD Delft, Netherlands

[2] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA

来源：

MECHATRONICS | 2008年 / 18卷 / 5-6期

基金：

美国国家卫生研究院;

关键词：

AFM; fast scanning; nano-positioning; nanotechnology; scanning probe; real-time imaging; mechanical design;

D O I：

10.1016/j.mechatronics.2008.02.007

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner's dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 mu m in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X-Y-plane. (c) 2008 Elsevier Ltd. All rights reserved.

引用

页码：282 / 288

页数：7

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