Design and input-shaping control of a novel scanner for high-speed atomic force microscopy

被引:187
作者
Schitter, Georg [1 ,2 ]
Thurner, Philipp J. [2 ]
Hansma, Paul K. [2 ]
机构
[1] Delft Univ Technol, Delft Ctr Syst & Control, NL-2628 CD Delft, Netherlands
[2] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
基金
美国国家卫生研究院;
关键词
AFM; fast scanning; nano-positioning; nanotechnology; scanning probe; real-time imaging; mechanical design;
D O I
10.1016/j.mechatronics.2008.02.007
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner's dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 mu m in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X-Y-plane. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:282 / 288
页数:7
相关论文
共 25 条
[1]   A high-speed atomic force microscope for studying biological macromolecules [J].
Ando, T ;
Kodera, N ;
Takai, E ;
Maruyama, D ;
Saito, K ;
Toda, A .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (22) :12468-12472
[2]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[3]   Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J].
Croft, D ;
Shed, G ;
Devasia, S .
JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01) :35-43
[4]   IMAGING CRYSTALS, POLYMERS, AND PROCESSES IN WATER WITH THE ATOMIC FORCE MICROSCOPE [J].
DRAKE, B ;
PRATER, CB ;
WEISENHORN, AL ;
GOULD, SAC ;
ALBRECHT, TR ;
QUATE, CF ;
CANNELL, DS ;
HANSMA, HG ;
HANSMA, PK .
SCIENCE, 1989, 243 (4898) :1586-1589
[5]   Trade-offs and performance limitations in mechatronic systems: a case study [J].
El Rifai, OM ;
Youcef-Toumi, K .
ANNUAL REVIEWS IN CONTROL, 2004, 28 (02) :181-192
[6]   Millipede -: A MEMS-based scanning-probe data-storage system [J].
Eleftheriou, E ;
Antonakopoulos, T ;
Binnig, GK ;
Cherubini, G ;
Despont, M ;
Dholakia, A ;
Dürig, U ;
Lantz, MA ;
Pozidis, H ;
Rothuizen, HE ;
Vettiger, P .
IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (02) :938-945
[7]   Data acquisition system for high speed atomic force microscopy [J].
Fantner, GE ;
Hegarty, P ;
Kindt, JH ;
Schitter, G ;
Cidade, GAG ;
Hansma, PK .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (02) :026118-1
[8]   Components for high speed atomic force microscopy [J].
Fantner, Georg E. ;
Schitter, Georg ;
Kindt, Johannes H. ;
Ivanov, Tzvetan ;
Ivanova, Katarina ;
Patel, Rohan ;
Holten-Andersen, Niels ;
Adams, Jonathan ;
Thurner, Philipp J. ;
Rangelow, Ivo W. ;
Hansma, Paul K. .
ULTRAMICROSCOPY, 2006, 106 (8-9) :881-887
[9]  
Guthold M, 1999, SURF INTERFACE ANAL, V27, P437, DOI 10.1002/(SICI)1096-9918(199905/06)27:5/6<437::AID-SIA505>3.0.CO
[10]  
2-N