Microfabricated Silicon Microneedle Array for Transdermal Drug Delivery

被引：33

作者：

Ji, Jing ^{[1
]}

Tay, Francis E. H. ^{[1
]}

Miao, Jianmin ^{[2
]}

Iliescu, Ciprian ^{[3
]}

机构：

[1] Natl Univ Singapore, Dept Mech, Singapore 119260, Singapore

[2] Nanyang Technol Univ, Micro Mahines Ctr, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

[3] Inst Bioengn & Nanotechnol, Singapore 138669, Singapore

来源：

INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷

关键词：

D O I：

10.1088/1742-6596/34/1/186

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents developed processes for silicon microneedle arrays microfabrication. Three types of microneedles structures were achieved by isotropic etching in inductively coupled plasma (ICP) using SF6/O-2 gases, combination of isotropic etching with deep etching, and wet etching, respectively. A microneedle array with biodegradable porous tips was further developed based on the fabricated microneedles.

引用

页码：1127 / 1131

页数：5

共 8 条

[1]

Bayliss SC, 1999, MATER WORLD, V7, P213

[2] Microfabricated microneedles: A novel approach to transdermal drug delivery [J].

Henry, S ;

McAllister, DV ;

Allen, MG ;

Prausnitz, MR .

JOURNAL OF PHARMACEUTICAL SCIENCES, 1998, 87 (08) :922-925

[3]

JI J, IMEMS 2006

[4] Transdermal delivery of antisense oligonucleotides with microprojection patch (Macroflux®) technology [J].

Lin, WQ ;

Cormier, M ;

Samiee, A ;

Griffin, A ;

Johnson, B ;

Teng, CL ;

Hardee, GE ;

Daddona, PE .

PHARMACEUTICAL RESEARCH, 2001, 18 (12) :1789-1793

[5] Transdermal delivery of insulin using microneedles in vivo [J].

Martanto, W ;

Davis, SP ;

Holiday, NR ;

Wang, J ;

Gill, HS ;

Prausnitz, MR .

PHARMACEUTICAL RESEARCH, 2004, 21 (06) :947-952

[6] Macroflux® microprojection array patch technology:: A new and efficient approach for intracutaneous immunization [J].

Matriano, JA ;

Cormier, M ;

Johnson, J ;

Young, WA ;

Buttery, M ;

Nyam, K ;

Daddona, PE .

PHARMACEUTICAL RESEARCH, 2002, 19 (01) :63-70

[7] Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: Fabrication methods and transport studies [J].

McAllister, DV ;

Wang, PM ;

Davis, SP ;

Park, JH ;

Canatella, PJ ;

Allen, MG ;

Prausnitz, MR .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2003, 100 (24) :13755-13760

[8] Biodegradable polymer microneedles: Fabrication, mechanics and transdermal drug delivery [J].

Park, JH ;

Allen, MG ;

Prausnitz, MR .

JOURNAL OF CONTROLLED RELEASE, 2005, 104 (01) :51-66

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