Excimer laser beam shaping and material processing using diffractive optics.

被引：2
|
作者：
Williams, SW
Marsden, PJ
Roberts, NC
Sidhu, J
Venables, MA
机构：
来源：
XI INTERNATIONAL SYMPOSIUM ON GAS FLOW AND CHEMICAL LASERS AND HIGH-POWER LASER CONFERENCE | 1997年 / 3092卷
关键词：
excimer lasers; beam shaping; diffractive optics; drilling; surface treatment;
D O I：
10.1117/12.270277
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Diffractive optical systems have been developed to allow high efficiency material processing using excimer lasers. These systems allow beam homogenising and shaping for surface treatment and parallel focusing for multiple hole drilling. Beam utilisation factors of 80% have been achieved.
引用
收藏
页码：431 / 434
页数：4
相关论文
共 50 条
  • [1] Excimer laser beam shaping and material processing using diffractive optics.
    Williams, SW
    Marsden, PJ
    Roberts, NC
    Sidhu, J
    Venables, MA
    HIGH-POWER LASER ABLATION, PTS 1-2, 1998, 3343 : 205 - 211
  • [2] Diffractive laser beam shaping for material processing using a CO2 laser
    Kanzler, K
    LASER BEAM SHAPING V, 2004, 5525 : 64 - 75
  • [3] Research on laser beam shaping technology using diffractive optics
    Nie, Shuzhen
    Yu, Jin
    Fan, Zhongwei
    Ge, Wenqi
    Liu, Yang
    Zhang, Xue
    Guangxue Xuebao/Acta Optica Sinica, 2013, 33 (SUPPL.1):
  • [4] Mask adapted beam shaping for material processing with excimer laser radiation
    Bernges, J
    Unnebrink, L
    Henning, T
    Kreutz, EW
    Poprawe, R
    OPTIKA '98 - 5TH CONGRESS ON MODERN OPTICS, 1998, 3573 : 108 - 111
  • [5] Laser Processing by Using Diffractive Optical Laser Beam Shaping Technique
    Raciukaitis, Gediminas
    Stankevicius, Evaldas
    Gecys, Paulius
    Gedvilas, Mindaugas
    Bischoff, Christian
    Jaeger, Erwin
    Umhofer, Udo
    Voelklein, Friedemann
    JOURNAL OF LASER MICRO NANOENGINEERING, 2011, 6 (01): : 37 - 43
  • [6] Beam shaping optics expand excimer-laser applications
    Masters, A
    Geuking, T
    LASER FOCUS WORLD, 2005, 41 (06): : 99 - +
  • [7] Diffractive shaping of excimer laser beams
    Turunen, J
    Päällönen, P
    Kuittinen, M
    Laakkonen, P
    Simonen, J
    Kajava, T
    Kaivola, M
    JOURNAL OF MODERN OPTICS, 2000, 47 (13) : 2467 - 2475
  • [8] Diffractive optics as beam-shaping elements for plastics laser welding
    Grewell, David
    Benatar, Avraham
    OPTICAL ENGINEERING, 2007, 46 (11)
  • [9] Circular and elliptic beam shaping using simple diffractive optics
    Fromager, M
    Aït-Ameur, K
    Sanchez, F
    ICONO 2001: NONLINEAR OPTICAL PHENOMENA AND NONLINEAR DYNAMICS OF OPTICAL SYSTEMS, 2002, 4751 : 604 - 608
  • [10] Beam shaping of ultra-short laser pulses using diffractive optics:: A theoretical study
    Zhang, SY
    Ren, YH
    Lüpke, G
    LASER BEAM SHAPING III, 2002, 4770 : 89 - 95
12345