A potential method for electrochemical micromachining of titanium alloy Ti6Al4V

被引：17

作者：

Jiang, L. M. ^{[1
,2
]}

Li, W. ^{[2
]}

Attia, A. ^{[1
,3
]}

Cheng, Z. Y. ^{[2
]}

Tang, J. ^{[1
]}

Tian, Z. Q. ^{[1
]}

Tian, Z. W. ^{[1
]}

机构：

[1] Xiamen Univ, Dept Chem, State Key Lab Phys Chem Solid Surfaces, Xiamen 361005, Peoples R China

[2] Nanchang Hangkong Univ, Sch Mat Sci & Engn, Nanchang 330063, Peoples R China

[3] Natl Res Ctr, Dept Phys Chem, Cairo, Egypt

来源：

JOURNAL OF APPLIED ELECTROCHEMISTRY | 2008年 / 38卷 / 06期

关键词：

bulk micromachining; confined etchant layer technique; etching; titanium;

D O I：

10.1007/s10800-008-9513-7

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The micromachining of complex three-dimensional microstructures (bulk micromachining) on metals can be applied to fabricate many novel devices for micro electromechanical system (MEMS), which will greatly benefit the development of MEMS. In this paper, a new electrochemical micromachining method named the confined etchant layer technique (CELT) was explored on the micromachining of the titanium alloy. Micro-scale trapezoidal slots were replicated on titanium alloy by using a mold with the corresponding negative microstructures (trapezoidal teeth). The machining resolution reached 0.503 mu m. The electrochemical mechanisms involved in the process are analyzed and the parameters that influenced the machining resolution are discussed.

引用

页码：785 / 791

页数：7

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