Effect of the electron energy distribution on the measurement of the atom concentration by optical actinometry

被引：11

作者：

Bernatskiy, A. V. ^{[1
]}

Ochkin, V. N. ^{[1
]}

Bafoev, R. N. ^{[2
]}

机构：

[1] Russian Acad Sci, Lebedev Phys Inst, Leninskii Pr 53, Moscow 119991, Russia

[2] Moscow Inst Phys & Technol, Inst Skii Per 9, Dolgoprudnyi 141700, Moscow Oblast, Russia

来源：

BULLETIN OF THE LEBEDEV PHYSICS INSTITUTE | 2016年 / 43卷 / 06期

基金：

俄罗斯科学基金会;

关键词：

actinometry; low-temperature plasma; atom concentration content; CROSS-SECTIONS; PLASMA;

D O I：

10.3103/S1068335616060038

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The oxygen and hydrogen atom concentrations in the hollow cathode discharge with water vapor additives are determined using small argon and xenon additives as optical actinometers. The problem of the rejection of measurements of the electron plasma component parameters is discussed.

引用

页码：195 / 198

页数：4

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