Improvement of Lamb waves sensors temperature sensitivity compensation

被引：7

作者：

Jia, H ^{[1
]}

Duhamel, R ^{[1
]}

Manceau, JF ^{[1
]}

de Labachelerie, M ^{[1
]}

Bastien, F ^{[1
]}

机构：

[1] FEMTO ST Inst, Dept LPMO, F-25044 Besancon, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 121卷 / 02期

关键词：

sensors; acoustic waves; Lamb waves; temperature sensitivity; mass sensitivity; temperature compensation;

D O I：

10.1016/j.sna.2005.02.014

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Anti-symmetrical Lamb wave mode A(0) presents a large sensitivity to mass loading and can be used in contact with liquids with a small attenuation. In a practical use point of view, the main problem of this kind of sensor is its temperature sensitivity. The influence of stress on temperature sensitivity has been studied. A first experiment is based on a stress compensation produced by differential thermal dilatation. The results showed a poor repeatability. Then, a completely different method has been developed. On the same membrane, two different waves with perpendicular propagating directions are produced. Experimentally, temperature sensitivity is rather different depending on the propagation direction but mass sensitivity is almost the same, which allows to distinguish temperature effects and effects due to mass loading on the frequency shift measurements. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：321 / 326

页数：6

共 7 条

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