Sub-15nm Optical Fiber Nanoimprint Lithography: A Parallel, Self-aligned and Portable Approach

被引：70

作者：

Kostovski, Gorgi ^{[1
]}

Chinnasamy, Udayakumar ^{[1
]}

Jayawardhana, Sasani ^{[2
]}

Stoddart, Paul R. ^{[2
]}

Mitchell, Arnan ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Microplatforms Res Grp, Platform Technol Res Inst, Melbourne, Vic 3001, Australia

[2] Swinburne Univ Technol, Fac Engn & Ind Sci, Hawthorn, Vic 3122, Australia

来源：

ADVANCED MATERIALS | 2011年 / 23卷 / 04期

基金：

澳大利亚国家健康与医学研究理事会;

关键词：

SURFACE; FABRICATION; NANOSTRUCTURES; SENSORS; RESOLUTION; ARRAYS;

D O I：

10.1002/adma.201002796

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate the parallel patterning of multiple optical-fiber facets using nanoimprint lithography on a novel platform. A resolution of better than 15 nm is demonstrated and up to 40 optical-fiber facets have been imprinted in parallel. The lithography platform features a self-alignment mechanism that greatly relaxes the mechanical requirements, allowing the demonstration of a compact, portable imprinting-module and the accommodation of non-planar, biological molds. The imprinted fibers are metalized and employed as bi-directional probes for surface-enhanced Raman scattering.

引用

页码：531 / +

页数：6

共 28 条

[1] High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates [J].

Ahn, Se Hyun ;

Guo, L. Jay .

ADVANCED MATERIALS, 2008, 20 (11) :2044-+

[2] Imprinted large-scale high density polymer nanopillars for organic solar cells [J].

Aryal, Mukti ;

Buyukserin, Fatih ;

Mielczarek, Kamil ;

Zhao, Xiao-Mei ;

Gao, Jinming ;

Zakhidov, Anvar ;

Hu, Wenchuang .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (06) :2562-2566

[3] Periodic nanostructures for photonics [J].

Busch, K. ;

von Freymann, G. ;

Linden, S. ;

Mingaleev, S. F. ;

Tkeshelashvili, L. ;

Wegener, M. .

PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2007, 444 (3-6) :101-202

[4] Engineering surface plasmon based fiber-optic sensors [J].

Dhawan, Anui ;

Muth, John F. .

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2008, 149 (03) :237-241

[5] Fabrication of Nanodot Plasmonic Waveguide Structures Using FIB Milling and Electron Beam-Induced Deposition [J].

Dhawan, Anuj ;

Gerhold, Michael ;

Madison, Andrew ;

Fowlkes, Jason ;

Russell, Phillip E. ;

Vo-Dinh, Tuan ;

Leonard, Donovan N. .

SCANNING, 2009, 31 (04) :139-146

[6] Fiber coupled waveguide grating structures [J].

Feng, Shengfei ;

Zhang, Xinping ;

Wang, Hao ;

Xin, Mudi ;

Lu, Zhenzhen .

APPLIED PHYSICS LETTERS, 2010, 96 (13)

[7] Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks [J].

Jeon, S ;

Park, JU ;

Cirelli, R ;

Yang, S ;

Heitzman, CE ;

Braun, PV ;

Kenis, PJA ;

Rogers, JA .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2004, 101 (34) :12428-12433

[8] An improved method of preparing composite poly(dimethylsiloxane) moulds [J].

Kang, H ;

Lee, J ;

Park, J ;

Lee, HH .

NANOTECHNOLOGY, 2006, 17 (01) :197-200

[9] A simple fabrication route to a highly transparent super-hydrophobic surface with a poly(dimethylsiloxane) coated flexible mold [J].

Kim, Mihee ;

Kim, Kyunghoon ;

Lee, Nae Yoon ;

Shin, Kyusoon ;

Kim, Youn Sang .

CHEMICAL COMMUNICATIONS, 2007, (22) :2237-2239

[10] Nanoimprinted optical fibres: Biotemplated nanostructures for SERS sensing [J].

Kostovski, G. ;

White, D. J. ;

Mitchell, A. ;

Austin, M. W. ;

Stoddart, P. R. .

BIOSENSORS & BIOELECTRONICS, 2009, 24 (05) :1531-1535

← 1 2 3 →