Measurement of distance to diffuse surfaces using non-scanning coherence radar

被引:4
作者
Carlsson, TE [1 ]
Nilsson, B [1 ]
机构
[1] Royal Inst Technol, Dept Mat Proc, S-10044 Stockholm, Sweden
来源
JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1998年 / 29卷 / 03期
关键词
white-light interferometer; distance measurement; diffuse surfaces; coherence; correlation;
D O I
10.1088/0150-536X/29/3/008
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An interferometer without moving parts is proposed for measurement of distances to, or distance differences between, diffuse surfaces. The interferometer, which is a variation of the non-scanning white-light interferometer, utilizes the limited coherence of the light source. The light is divided by a beamsplitter and reflected from two surfaces, one reference and one object surface. After recombination it is spatially filtered. A distance difference causes a delay between the reflections. The delay can be measured with the non-scanning white-light interferometer, by finding the positions of the correlation peaks. Since there are no moving parts, the interferometer can be used to measure rapidly moving objects.
引用
收藏
页码:146 / 151
页数:6
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