Fabrication of refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography

被引：48

作者：

Yu, WX ^{[1
]}

Yuan, XC ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

OPTICS EXPRESS | 2003年 / 11卷 / 08期

关键词：

D O I：

10.1364/OE.11.000899

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the fabrication of a refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography. The hybrid sol-gel material has high transmittance (greater than 95%) in the wavelength range from 362nm to 2000nm. Under the electron beam exposure, the polymerized film thickness was as large as 4 mum. A 3D microlens profile can be formed by exposure of the sol-gel film under different electron dosages that leads to different polymerized film thickness after development. As an example, a microlens with a 250 mum diameter and a 2.05 mum sag height was fabricated. (C) 2003 Optical Society of America.

引用

页码：899 / 903

页数：5

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