Trends in electromechanical transduction

被引：43

作者：

Busch-Vishniac, IJ

机构：

来源：

PHYSICS TODAY | 1998年 / 51卷 / 07期

关键词：

D O I：

10.1063/1.882325

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

[No abstract available]

引用

页码：28 / 34

页数：7

共 11 条

[1] Continuous-membrane surface-micromachined silicon deformable mirror [J].

Bifano, TG ;

Mali, RK ;

Dorton, JK ;

Perreault, J ;

Vandelli, N ;

Horenstein, MN ;

Castanon, DA .

OPTICAL ENGINEERING, 1997, 36 (05) :1354-1360

[2]

Curie J., 1880, C. R. Acad. Sci, V91, P294

[3]

HASSELMARK ED, 1986, Patent No. 4585978

[4]

Holmes M, 1997, PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, P474

[5]

LANGEVIN P, 1921, Patent No. 145691

[6]

Lindsay R. B., 1973, PHYS TODAY, V26, P55

[7] MODELING OF PIEZOELECTRIC CERAMIC VIBRATORS INCLUDING THERMAL EFFECTS .1. THERMODYNAMIC PROPERTY CONSIDERATIONS [J].

MOON, WK ;

BUSCHVISHNIAC, IJ .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1995, 98 (01) :403-412

[8]

RISTIC L, 1994, SENSOR TECHNOLOGY DE, pCH1

[9]

SAVAGE HT, 1981, Patent No. 4308474

[10]

Scheeper P. R., 1992, Journal of Microelectromechanical Systems, V1, P147, DOI 10.1109/84.186394

← 1 2 →