3D force sensor for biomechanical applications

被引：31

作者：

Brookhuis, R. A. ^{[1
]}

Lammerink, T. S. J. ^{[1
]}

Wiegerink, R. J. ^{[1
]}

de Boer, M. J. ^{[1
]}

Elwenspoek, M. C. ^{[1
,2
]}

机构：

[1] Univ Twente, Transducers Sci & Technol Grp, MESA Res Inst, NL-7500 AE Enschede, Netherlands

[2] Univ Freiburg, FRIAS, D-79104 Freiburg, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 182卷

关键词：

Force sensor; Power transfer; Capacitive sensing; Micromachining; Human interaction; Tactile robot; Haptic; SILICON LOAD CELL; OXIDATION;

D O I：

10.1016/j.sna.2012.04.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：28 / 33

页数：6

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