Slope measurement of a phase object using a polarizing phase-shifting high-frequency Ronchi grating interferometer

被引：23

作者：

Toto-Arellano, Noel-Ivan ^{[1
]}

Martinez-Garcia, Amalia ^{[1
]}

Rodriguez-Zurita, Gustavo ^{[2
]}

Antonio Rayas-Alvarez, Juan ^{[1
]}

Montes-Perez, Areli ^{[2
]}

机构：

[1] Ctr Invest Opt AC, Leon 37150, Gto, Mexico

[2] Benemerita Univ Autonoma Puebla, Lab Interferometria & Holog, Fac Ciencias Fis Matemat, Puebla, Mexico

来源：

APPLIED OPTICS | 2010年 / 49卷 / 33期

关键词：

OF-PLANE DISPLACEMENT; SHEARING INTERFEROMETER; PATTERN INTERFEROMETRY; ELECTRONIC SPECKLE; POLARIZATION;

D O I：

10.1364/AO.49.006402

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interferometric method to measure the slope of phase objects is presented. The analysis was performed by implementing a polarizing phase-shifting cyclic shear interferometer coupled to a 4-f Fourier imaging system with crossed high-frequency Ronchi gratings. This system can obtain nine interference patterns with adjustable phase shifts and variable lateral shear. In order to extract the slope of a phase object, it is only analyzed using four patterns obtained in a single shot, and applying the classical method of phase extraction. (C) 2010 Optical Society of America

引用

页码：6402 / 6408

页数：7

共 27 条

[1] Two-shot point-diffraction interferometer with an unknown phase shift [J].