共 16 条
[4]
BRONSHTEIN IM, 1969, 2 ELECT EMISSION
[5]
ENGEL AV, 1955, IONIZED GASES
[6]
GRANOVSKII VL, 1971, ELECT CURRENT GAS
[7]
Heavy-particle hybrid simulation of a high-voltage glow discharge in helium
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2003, 42 (6A)
:3633-3640
[8]
Ivanov I., 1990, METAL VAPOR ION LASE
[9]
KLIMENKO KA, 1990, ZH TEKH FIZ+, V60, P138
[10]
THE THEORETICAL AND EXPERIMENTAL-STUDY OF LARGE APERTURE LOW-ENERGY E-BEAM SOURCE FOR SEMICONDUCTOR PROCESSING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (04)
:1086-1091