Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets

被引：3

作者：

Du, Guangtao ^{[1
]}

Chen, Xiangdong ^{[1
]}

Lin, Qibin ^{[1
]}

机构：

[1] SW Jiaotong Univ, Sch Informat Sci & Technol, Chengdu 610031, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 11期

关键词：

Bearing steel; cylindrical ferromagnets; magnetic field sensors; Ni; permeability; DEMAGNETIZING FACTORS; MICROCANTILEVER; FABRICATION; CYLINDERS; DESIGN;

D O I：

10.1109/JSEN.2011.2153195

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to solve the problems of cantilever-based magnetic sensors and develop the simple and low-cost magnetic field sensors, novel sensors based on a cylindrical ferromagnet attached to a silicon diaphragm and piezoresistive membrane are proposed. The interaction between the magnetic field and the ferromagnet generates a deflection of the diaphragm, which changes the piezoresistance and unbalances a Wheatstone bridge. The sensitivity of the sensors is proportional to the permeability, supply voltage, and aspect ratio of the ferromagnet. These low-cost, low-power sensors are easily integrated with electronic circuits.

引用

页码：2973 / 2979

页数：7

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