Influences of film thickness and annealing temperature on properties of sol-gel derived ZnO-SnO2 nanocomposite thin film

被引:27
作者
Lee, Sang-Min [1 ]
Joo, Young-Hee [1 ]
Kim, Chang-Il [1 ]
机构
[1] Chung Ang Univ, Dept Elect & Elect Engn, Seoul 156756, South Korea
关键词
Sol-gel; Spin coating; ZnO-SnO2 (ZTO); Film thickness; Annealing temperature; OPTICAL-PROPERTIES; ZNO FILMS; TRANSPARENT; TRANSISTORS; FABRICATION; SILVER;
D O I
10.1016/j.apsusc.2014.09.099
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this study, ZnO-SnO2 nanocomposite thin film was prepared on glass substrates with different film thicknesses and annealing temperatures through a sol-gel method. From the results of thermogravimetric analysis (TGA), it was deduced that the ZnO-SnO2 thin film could be sufficiently formed at approximately 500 degrees C. The XRD patterns showed enhanced crystallinity of the ZnO-SnO2 thin film with increasing film thickness and annealing temperature. However, it was also revealed that the crystallinity deteriorated when the film thickness and annealing temperature are 270 nm and 700 degrees C, respectively. The variation in electrical resistivity corresponded to intensities of the (0 0 2) diffraction peaks shown in the XRD patterns. It was also found that the increase of film thickness and annealing temperature led to rougher surface morphology and to an increase in grain size. The optical properties deteriorated with increasing film thickness and annealing temperature of the ZnO-SnO2 thin films. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:494 / 501
页数:8
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