Regulation of precursor solution concentration for In-Zn oxide thin film transistors

被引:3
|
作者
Chen, Yanping [1 ]
He, Zhongyuan [1 ]
Li, Yaogang [2 ]
Zhang, Qinghong [2 ]
Hou, Chengyi [2 ]
Wang, Hongzhi [1 ]
机构
[1] Donghua Univ, Coll Mat Sci & Engn, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China
[2] Donghua Univ, Minist Educ, Engn Res Ctr Adv Glasses Mfg Technol, Shanghai 201620, Peoples R China
关键词
Transparent thin-film transistors; Indium-zinc oxide; Concentration; Solution-processed; LOW-TEMPERATURE; FULLY TRANSPARENT; THRESHOLD-VOLTAGE; FABRICATION; COMPLEX;
D O I
10.1016/j.cap.2018.07.009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The tunable electronic performance of the solution-processed semiconductor metal oxide is of great significance for the printing electronics. In current work, transparent thin-film transistors (TFTs) with indium-zinc oxide (IZO) were fabricated as active layer by a simple eco-friendly aqueous route. The aqueous precursor solution is composed of water without any other organic additives and the IZO films are amorphous revealed by the X-ray diffraction (XRD). With systematic studies of atomic force microscopy (AFM), X-ray photoemission spectroscopy (XPS) and the semiconductor property characterizations, it was revealed that the electrical performance of the IZO TFTs is dependent on the concentration of precursor solution. As well, the optimum preparation process was obtained. The concentrations induced the regulation of the electronic performance was clearly demonstrated with a proposed mechanism. The results are expected to be beneficial for development of solution-processed metal oxide TFTs.
引用
收藏
页码:1300 / 1305
页数:6
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