Discrete sources method for light scattering analysis from 3D asymmetrical features on a substrate

被引：4

作者：

Eremin, YA

Stover, JC

Grishina, NV

机构：

[1] Moscow MV Lomonosov State Univ, Appl Math & Comp Sci Fac, Moscow 119899, Russia

[2] ADE Corp, Westwood, MA 02090 USA

[3] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119899, Russia

来源：

JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER | 2001年 / 70卷 / 4-6期

关键词：

light scattering; feature on a substrate; mathematical modelling; discrete sources method; computer simulation;

D O I：

10.1016/S0022-4073(01)00020-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The discrete sources method is extended to analyze polarized light scattering by three-dimensional asymmetrical features on a plane penetrable substrate. The strict mathematical model and corresponding numerical scheme are described. Computer simulation results of non-spherical micro-particle scattering show that particle shape has a stronger effect on measured response for normal incident scanners. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：421 / 431

页数：11

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[3]

DMITRIEV VI, 1963, FIELDS STRATIFIED ME

[4]

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