A comparison of precision optical displacement sensors for the 3D measurement of complex surface profiles

被引：22
作者：
Boltryk, Peter J. [1 ]
Hill, Martyn [1 ]
McBride, John W. [1 ]
Nasce, Antony [1 ]
机构：
[1] Univ Southampton, Sch Engn Sci, Southampton, Hants, England
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 142卷 / 01期
基金：
英国工程与自然科学研究理事会;
关键词：
non-contact metrology; optical displacement sensor; profilometer; sound recovery;
D O I：
10.1016/j.sna.2007.03.006
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications, such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings and recommend sensor selection based on parameters, including measurement area, time and resolution. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：2 / 11
页数：10
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