Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process

被引：9

作者：

Kim, Jong Hyun ^{[1
,2
]}

Chang, Suk Sang ^{[1
]}

Lim, Geunbae ^{[2
,3
]}

Lee, Bong-Kee ^{[4
]}

机构：

[1] Pohang Univ Sci & Technol POSTECH, PAL, Pohang 790784, Gyeongbuk, South Korea

[2] Pohang Univ Sci & Technol POSTECH, Dept Mech Engn, Pohang 790784, Gyeongbuk, South Korea

[3] Pohang Univ Sci & Technol POSTECH, Dept Integrat Biosci & Biotechnol, Pohang 790784, Gyeongbuk, South Korea

[4] Chonnam Natl Univ, Sch Mech Syst Engn, Kwangju 500757, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 06期

关键词：

THERMOPLASTIC POLYMERS; MOLD FABRICATION; LIGA PROCESS; MICROFABRICATION; MICROSTRUCTURES; INSERTS; BEAM;

D O I：

10.1143/JJAP.50.06GM11

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the present study, a vertically modularized and sectioned micromold system (v-MSMS) is proposed and developed by synchrotron X-ray micromachining process. The developed v-MSMS is a novel concept of constructing a micromold system by stacking several micromold modules. As one representative application of the present v-MSMS, micromold system with several kinds of spur gear patterns was fabricated using deep X-ray lithography and a subsequent nickel electroforming process. Then, the usefulness of v-MSMS was demonstrated by casting the microgear with multiple layers. The proposed technique can be a useful tool for the mass replication of multilayered mechanical components, various micro parts, complicated microstructures, and so on. (C) 2011 The Japan Society of Applied Physics

引用

页数：4

共 25 条

[1]

Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[2] Micromilling of hardened tool steel for mould making applications [J].