Two-photon micromachining for functional photonic crystals

被引：0
|
作者：
Kawata, S [1 ]
Sun, HB [1 ]
机构：
[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan
来源：
NANO-AND MICRO-OPTICS FOR INFORMATION SYSTEMS | 2003年 / 5225卷
关键词：
two-photon photopolymerization; laser nanofabrication; photonic crystal; photonic bandgap;
D O I：
10.1117/12.508530
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Two-photon photopolymerization, as an important laser nanofabrication scheme, is applicable to production of micromechanical and optoelectronic devices of various dimensions. Here we report our latest progress in using this technology for fabrication of functional photonic crystals, including the achievement of high reproducibility writing by using finely quantified pixels, high-fidelity shaping through shrinkage pre-compensation, and attainment of complex three-dimensional diamond-lattice structures. These works would be essential for advanced functions of photonic crystal-based polymer optoelectronic devices.
引用
收藏
页码：35 / 39
页数：5
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