Recent advances in deterministic, low-cost finishing of sapphire windows

被引:12
作者
Hallock, B [1 ]
Dumas, P [1 ]
Shorey, A [1 ]
Tricard, M [1 ]
机构
[1] QED Technol Inc, Rochester, NY 14607 USA
来源
Window and Dome Technologies and Materials IX | 2005年 / 5786卷
关键词
magnetorheological finishing; MRF; sapphire; deterministic polishing; sub-aperture;
D O I
10.1117/12.603930
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
There is an increasing demand for large sapphire windows for a number of defense related pro-rams. Some of these emerging requirements call for windows that are on the order of half a meter in size with tight surface figure and transmitted wavefront requirements. Magnetorheological Finishing (MRF (R)) is a deterministic polishing process capable of rapidly converging to the required surface figure. MRF finishing of sapphire has been demonstrated with surface accuracies better than 0.07 mu m peak-to-valley (0.010 mu m RMS) and surface microroughness less than 1.0 nm RMS on circular and square apertures. As a sub-aperture polishing technique, MRF provides a mechanism for effectively addressing and correcting a variety of optical surface features. This is of particular interest when correcting the transmitted wavefront on windows. The process allows for correction of the optical wavefront when it is aberrated due to inhomogeneity in the material in addition to the errors in the surface. Another benefit is that MRF has been shown to remove subsurface damage left from prior fabrication steps and can improve surface toughness of pre-polished sapphire. We report on a predictable, lower-cost process for fabricating large-scale sapphire windows.
引用
收藏
页码:154 / 164
页数:11
相关论文
共 19 条
[1]  
ARRASMITH SR, 2001, SPIE, V4451
[2]   High-energy, high-average-power laser with Nd:YLF rods corrected by magnetorheological finishing [J].
Bagnoud, V ;
Guardalben, MJ ;
Puth, J ;
Zuegel, JD ;
Mooney, T ;
Dumas, P .
APPLIED OPTICS, 2005, 44 (02) :282-288
[3]   Mechanics of polishing [J].
Bulsara, VH ;
Ahn, Y ;
Chandrasekar, S ;
Farris, TN .
JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 1998, 65 (02) :410-416
[5]   Magnetorheological finishing (MRF) in commercial precision optics manufacturing [J].
Golini, D ;
Kordonski, WI ;
Dumas, P ;
Hogan, S .
OPTICAL MANUFACTURING AND TESTING III, 1999, 3782 :80-91
[6]  
GOLINI D, 2001, LASER FOCUS WORL JUL
[7]  
Golini D., 1997, P SPIE CR, VCR67, P251
[8]  
GOLINI D, 2001, OPTICS PHOTONICS NEW
[9]  
Harris D.C., 1999, MAT INFRARED WINDOWS
[10]  
HARRIS DC, 2004, SPIE ED SHORT COURSE