Experimental and Theoretical Results on SC-Cut Quartz esonators ollectively ealized on 4" Wafers

被引：0

作者：

Clairet, A. ^{[1
]}

Couteleau, L. ^{[1
]}

Laroche, T. ^{[2
]}

Boy, J-J. ^{[3
]}

机构：

[1] RAKON France, 2 Rue Robert Keller, F-10150 Pont St Marie, France

[2] Freen Sys SAS, F-25000 Besancon, France

[3] ENSMM, FEMTO ST, Dept TF, F-25000 Besancon, France

来源：

2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC) | 2013年

关键词：

Quartz; Piezoelectric resonator; Bulk Acoustic Wave; Finite Element Method; Quality factor;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In order to produce collective SC-cut quartz resonators on 4'' wafers, we use a Finite Element Analysis software to model and simulate new resonator design. The modeling allowed us to optimize the geometrical and the physical parameters of the prototypes. These resonators are encapsulated under vacuum to not damage their performances. Knowing that a structure with radius of curvature is hardly compatible with collective fabrication, we have realized plano-plano structure working at 14 MHz.

引用

页码：662 / +

页数：2

共 4 条

[1] Clairet A, 2012, 2012 EUROPEAN FREQUENCY AND TIME FORUM (EFTF), P49
[2] ANISOTROPIC ACOUSTIC ATTENUATION WITH NEW MEASUREMENTS FOR QUARTZ AT ROOM TEMPERATURES
LAMB, J
RICHTER, J
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1966, 293 (1435) : 479 - +
[3] Puccio D., 2008, P COMSOL C BOST
[4] Theory and Experimental Verifications of the Resonator Q and Equivalent Electrical Parameters due to Viscoelastic and Mounting Supports Losses
Yong, Yook-Kong
Patel, Mihir S.
Tanaka, Masako
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (08) : 1831 - 1839

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