Real-time Spectroscopy Enabled by External Cavity QCLs with MOEMS Diffraction Gratings

被引：7

作者：

Butschek, L. ^{[1
]}

Hugger, S. ^{[1
]}

Jarvis, J. ^{[1
]}

Haertelt, M. ^{[1
]}

Merten, A. ^{[2
]}

Grahmann, J. ^{[2
]}

Boskovic, D. ^{[3
]}

Fuchs, F. ^{[1
]}

Ostendorf, R. ^{[1
]}

Schilling, C. ^{[1
]}

Rattunde, M. ^{[1
]}

Wagner, J. ^{[1
]}

机构：

[1] Fraunhofer Inst Appl Solid State Phys IAF, Tullastr 72, D-79108 Freiburg, Germany

[2] Fraunhofer Inst Photon Microsyst, Maria Reiche Str 2, D-01109 Dresden, Germany

[3] Fraunhofer Inst Chem Technol, Joseph Von Fraunhofer Str 7, D-76327 Pfinztal, Germany

来源：

QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XIV | 2017年 / 10111卷

关键词：

quantum cascade lasers; MOEMS; external cavity laser; mid-IR spectroscopy; real-time spectroscopy; QUANTUM CASCADE LASERS;

D O I：

10.1117/12.2251915

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this contribution, we report on real-time mid-IR spectroscopy enabled by rapidly tunable External Cavity Quantum Cascade Lasers (EC-QCLs). High speed spectral scanning in a Littrow-type resonator is realized by employing a resonantly driven micro-opto-electro-mechanical-systems (MOEMS) grating as wavelength selective element. Oscillating at a frequency of 1 kHz with mechanical amplitudes of up to 10 degrees, the MOEMS grating is able to cover the whole spectral range provided even by broad-gain QCL chips in just 500 mu s. In addition to the high spectral scanning frequency, the MOEMS approach also allows for a miniaturized and rugged design of the EC-QCL. An evaluation of this laser source with regard to spectral reproducibility of consecutive scans, pulse intensity noise, and spectral resolution will be given. Furthermore, we present spectroscopic measurements in backscattering as well as in transmission geometry, demonstrating the real-time capability in different scenarios.

引用

页数：11

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