Low-frequency noise properties of SiGe heterojunction bipolar transistors

被引:2
|
作者
Hsieh, Meng-Wei
Hsin, Yue-Ming [1 ]
Chan, Yi-Jen
Tang, Denny
机构
[1] Natl Cent Univ, Dept Elect Engn, Chungli 32054, Taiwan
[2] Taiwan Semicond Mfg Co, Hsinchu 300, Taiwan
关键词
low-frequency noise; selectively implanted collector; impurity; fluctuation noise;
D O I
10.1143/JJAP.46.5729
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this study, we investigated the low-frequency noise in SiGe heterojunction bipolar transistors (HBTs) with and without a selectively implanted collector (SIC). By comparing the magnitude of I If noise, collector current, and current gains of the SiGe HBTs with and without SIC we show that the impurities at the collector produced by the incomplete activation of the implanted ions cause an increase in the collector current I If noise spectrum. Thus, SiGe HBT with SIC exhibits higher collector noise current spectra due to the inactive ions in the collector. The figures-of-merit of noise corner frequency (fc) to cutoff frequency ratio (f(r)), f(c)/f(T)., indicates that the SiGe HBT without SIC has a better low-frequency noise property for circuit application prior to the f(T) roll-off. Furthermore, at the onset of high injection effect, the conspicuous degradation of high-frequency properties also deteriorates the f(c)/f(t) ratio of SiGe HBT without SIC.
引用
收藏
页码:5729 / 5733
页数:5
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