High performance micropumps based on printed circuit board technology

This paper presents a high performance micropump based on the printed circuit board technology. This pump was our first effort to lower the packaging cost by combining functional elements (diffuser/nozzle) with packaging materials (PCB, inlet/outlet tubes). The paper presents in details the numerical simulation, the fabrication and the experimental characterization of the pump. Experimental results have shown a high pump performance. A flow rate of 3ml/min can be achieved with a drive voltage of 120V. Pumps with different distances between inlet and outlet were tested. Characterization results agreed well with simulation results. Pumps with a short distance between inlet and outlet have a better performance.