GaN;
p-n junction;
E-mode;
p-GaN;
high electron mobility transistor (HEMT);
GATE RELIABILITY;
ENHANCEMENT;
PERFORMANCE;
MOBILITY;
PASSIVATION;
METAL;
D O I:
10.1109/LED.2020.2977143
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
In this work, we demonstrate a GaN-based p-n junction gate (PNJ) HEMT featuring an n-GaN/p-GaN/AlGaN/GaN gate stack. Compared to the more conventional p-GaN gate HEMT with a Schottky junction between the gatemetal and p-GaN layer, the p-n junction can withstand higher reverse bias at the same peak electric-field as the depletion region extends to both the n-side and p-side, while exhibiting lower leakage current. The PNJ-HEMT shows a positive threshold voltage (V-TH) of 1.78 V, a small gate leakage (similar to 10(-3) mA/mm @ V-GS = 10 V). In particular, a large forward gate breakdown voltage of 19.35 V at 25 degrees C and 19.70 V at 200 degrees C was achieved with the PNJ-gate HEMT.
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Cai, Y
Zhou, YG
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Zhou, YG
Chen, KJ
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Chen, KJ
Lau, KM
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Chen, Kevin J.
Haeberlen, Oliver
论文数: 0引用数: 0
h-index: 0
机构:
Infineon Technol Austria AG, A-9500 Villach, AustriaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Haeberlen, Oliver
Lidow, Alex
论文数: 0引用数: 0
h-index: 0
机构:
Efficient Power Conversion Corp, El Segundo, CA 90245 USAHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Lidow, Alex
Tsai, Chun Lin
论文数: 0引用数: 0
h-index: 0
机构:
Taiwan Semicond Mfg Co Ltd, Power IC Program, Analog RF & Specialty Technol Div Res & Dev, Hsinchu 30077, TaiwanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Tsai, Chun Lin
Ueda, Tetsuzo
论文数: 0引用数: 0
h-index: 0
机构:
Panasonic Corp, Automot & Ind Syst Co, Ind Business Dev Ctr, Osaka 5718501, JapanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Ueda, Tetsuzo
Uemoto, Yasuhiro
论文数: 0引用数: 0
h-index: 0
机构:
Panason Semicond Solut Co Ltd, Semicond Business Unit, Business & Dev Ctr 1, Kyoto 6178520, JapanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Uemoto, Yasuhiro
Wu, Yifeng
论文数: 0引用数: 0
h-index: 0
机构:
Transphorm Inc, Goleta, CA 93117 USAHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Gao, Sheng
Zhou, Quanbin
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Zhou, Quanbin
Liu, Xiaoyi
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Liu, Xiaoyi
Wang, Hong
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Zhongshan Inst Modern Ind Technol, Zhongshan 528437, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
He, Jiabei
Wei, Jin
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Wei, Jin
Yang, Song
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Yang, Song
Wang, Yuru
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Wang, Yuru
Zhong, Kailun
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Zhong, Kailun
Chen, Kevin J.
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Cai, Y
Zhou, YG
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Zhou, YG
Chen, KJ
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Chen, KJ
Lau, KM
论文数: 0引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Chen, Kevin J.
Haeberlen, Oliver
论文数: 0引用数: 0
h-index: 0
机构:
Infineon Technol Austria AG, A-9500 Villach, AustriaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Haeberlen, Oliver
Lidow, Alex
论文数: 0引用数: 0
h-index: 0
机构:
Efficient Power Conversion Corp, El Segundo, CA 90245 USAHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Lidow, Alex
Tsai, Chun Lin
论文数: 0引用数: 0
h-index: 0
机构:
Taiwan Semicond Mfg Co Ltd, Power IC Program, Analog RF & Specialty Technol Div Res & Dev, Hsinchu 30077, TaiwanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Tsai, Chun Lin
Ueda, Tetsuzo
论文数: 0引用数: 0
h-index: 0
机构:
Panasonic Corp, Automot & Ind Syst Co, Ind Business Dev Ctr, Osaka 5718501, JapanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Ueda, Tetsuzo
Uemoto, Yasuhiro
论文数: 0引用数: 0
h-index: 0
机构:
Panason Semicond Solut Co Ltd, Semicond Business Unit, Business & Dev Ctr 1, Kyoto 6178520, JapanHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Uemoto, Yasuhiro
Wu, Yifeng
论文数: 0引用数: 0
h-index: 0
机构:
Transphorm Inc, Goleta, CA 93117 USAHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Gao, Sheng
Zhou, Quanbin
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Zhou, Quanbin
Liu, Xiaoyi
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
Liu, Xiaoyi
Wang, Hong
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Zhongshan Inst Modern Ind Technol, Zhongshan 528437, Peoples R ChinaSouth China Univ Technol, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Peoples R China
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
He, Jiabei
Wei, Jin
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Wei, Jin
Yang, Song
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Yang, Song
Wang, Yuru
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Wang, Yuru
Zhong, Kailun
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Zhong, Kailun
Chen, Kevin J.
论文数: 0引用数: 0
h-index: 0
机构:
HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R ChinaHKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China