Analyzing UV/Vis/NIR Spectra-Sputtered ZnO:Al Thin-Films-I: Space-Time Depend

被引：0

作者：

Stadler, Andreas ^{[1
]}

Stoellinger, Johannes ^{[1
]}

Pachler, Astrid ^{[1
]}

Aigner, Gerhard ^{[1
]}

Topa, Dan ^{[1
]}

Dittrich, Herbert ^{[1
]}

机构：

[1] Salzburg Univ, Dept Mat Res & Phys, A-5020 Salzburg, Austria

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2011年 / 24卷 / 02期

关键词：

Aluminum doped zinc-oxide (ZnO:Al); optical conductivity measurement; spectroscopy; sputter-theory; UV/Vis/NIR; OPTICAL-CONSTANTS; TRANSMISSION SPECTRA; THICKNESS; TRANSMITTANCE; REFLECTANCE;

D O I：

10.1109/TSM.2011.2109742

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Exact, contact-free and non-destructive optical analysis of semiconducting layers is advantageous for thin-film solar cell applications. A non-numerical theoretical model has been developed to extract approximation-free optical and electrical data from UV/visible (Vis)/near infra-red (NIR) spectra. Special focus has been set on single-layer systems. Approximations for thin-films upon substrates and measurements without integrating sphere are provided. Complex parameter evaluation is provided. This exact data acquisition model provides deeper insight into the process-parameter dependencies of pulsed direct current sputtered, transparent aluminum doped zinc-oxide (ZnO:Al) thin films, upon glass substrates. ZnO:Al thin films have been analyzed with respect to space-time dependencies of the sputter process. Therefore, sputter-depositions have been examined, referring to positions upon the substrate, r, target-substrate distances, d(TarSub), and sputter durations, t(Sp). Results were compared with those of the well-known Keradec/Swanepoel model. The necessity of taking both spectra-transmission and reflection spectra-into account has been shown. Theoretical sputter-concepts were proved and enhanced. A non-contact, optical conductivity measurement possibility by use of UV/Vis/NIR spectroscopy has been provided. Optically evaluated conductivities, L-sigma, were compared with electrically taken values, by a four-tip measurement system.

引用

页码：366 / 374

页数：9

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