Damping in micro-scale generalized thermoelastic circular plate resonators

被引：50
作者：
Sharma, J. N. [1 ]
Sharma, R. [2 ]
机构：
[1] Natl Inst Technol, Dept Math, Hamirpur 177005, India
[2] Natl Inst Technol, Dept Elect & Commun Engn, Hamirpur 177005, India
来源：
ULTRASONICS | 2011年 / 51卷 / 03期
关键词：
Damping; Resonators; Thermal relaxation; Thin plates; MEMS; INTERNAL-FRICTION; BEAM RESONATORS; MICRORESONATORS; DISSIPATION; VIBRATION;
D O I：
10.1016/j.ultras.2010.10.009
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The out-of-plane vibrations of a generalized thermoelastic circular plate are studied under different environmental temperature, plate dimensions and boundary conditions. The analytical expressions for thermoelastic damping of vibration and phase velocity of circumferential surface wave modes are obtained. It is noticed that the damping of vibrations and phase velocities of circumferential surface wave modes significantly depend on thermal relaxation time in addition to thermoelastic coupling in circular plates under resonance conditions. The surface conditions also impose significant effects on the vibrations of such resonators. The expressions for displacement and temperature fields in the plate resonator are also derived and obtained. Some numerical results have also been presented for illustration purpose in case of silicon material plate. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：352 / 358
页数：7
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