APCVD Transition Metal Oxides - Functional Layers in "Smart windows"

Transition metal oxides (TMO) exhibit electrochromic effect. Under a small voltage they change their optical transmittance from transparent to collored (absorbing) state. The individual material can manifest its electrochromic properties only when it is part of electrochromic (EC) multilayer system. Smart window is controlling the energy of solar flux entering the building or car and makes the interiors comfortable and energy utilization more effective. Recently the efforts of material researchers in this field are directed to price decreasing. APCVD technology is considered as promissing as this process permits flow-through large-scale production process. The paper presents results on device optimization based on WO3-MoO3 working electrode. Extensive research reveals that WO3-MoO3 structure combines positive features of single oxides: excellent electrochromic performance of WO3 and better kinetic properties of MoO3 deposition. The achieved color efficiency of APCVD WO3-MoO3 films is 200cm(2)/C and optical modulation of 65-70% are practically favorable electrochromic characteristics. To respond to low cost requirement, the expensive hexacarbonyl can be replaced with acetylacetonate. We have started with this precursor to fabricate mixed WxV1-xO3 films. The films possess excellent surface coverage and high growth-rate. CVD deposition of VO2, a promissing thermochromic thin film material is also presented.