The morphology and structural properties of InP thin films deposited by spray pyrolysis method

被引：7

作者：

Aksoy, Funda ^{[1
]}

Kayali, Refik ^{[1
]}

Oeztas, Mustafa ^{[2
]}

Bedir, Metin ^{[2
]}

机构：

[1] Nigde Univ, Dept Phys, Fac Art & Sci, Nigde, Turkey

[2] Gaziantep Univ, Dept Engn Phys, Fac Engn, Gaziantep, Turkey

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2008年 / 69卷 / 04期

关键词：

thin films; vapour deposition; X-ray diffraction; crystal structure;

D O I：

10.1016/j.jpcs.2007.09.006

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

InP film samples were prepared by spray pyrolysis technique using aqueous solutions of InCl3 and Na2HPO4, which were atomized with compressed air as carrier gas onto glass substrates at 500 degrees C with different thicknesses of the films. The structural properties of the samples have been determined by using X-ray diffraction (XRD). It was found that the crystal structure of the InP films is polycrystalline hexagonal. The orientations for all the obtained films are along the e-axis perpendicular to the substrate. It is observed that the crystallite sizes of the films increase with the thickness of the film up to 616 rim. The changes observed in the morphology and structural phases related to the film thickness have been discussed in detail. (C) 2007 Elsevier Ltd. All rights reserved.

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收藏

页码：835 / 838

页数：4

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