High-voltage (900 V) 4H-SiC Schottky diodes with a boron-implanted guard p-n junction

High-voltage (900 V) 4H-SiC Schottky diodes terminated with a guard p-n junction were fabricated and studied. The guard p-n junction was formed by room-temperature boron implantation with subsequent high-temperature annealing. Due to transient enhanced boron diffusion during annealing, the depth of the guard p-n junction was equal to about 1.7 mu m, which is larger by approximately 1 mu m than the projected range of 11 B ions in 4H-SiC. The maximum reverse voltage of fabricated 4H-SiC Schottky diodes is found to be limited by avalanche breakdown of the planar p-n junction; the value of the breakdown voltage (910 V) is close to theoretical estimate in the case of the impurity concentration N = 2.5 x 10(15) cm(-3) in the n-type layer, thickness of the n-type layer d = 12.5 mu m, and depth of the p-n junction r(j) = 1.7 mu m. The on-state diode resistance (3.7 m Omega cm(2)) is controlled by the resistance of the epitaxial n-type layer. The recovery charge of about 1.3 nC is equal to the charge of majority charge carriers that are swept out of an epitaxial n-type layer under the effect of a reverse voltage.