Nonlinear Hydraulic Pressure Response of an Improved Fiber Tip Interferometric High-Pressure Sensor

We demonstrate a silica diaphragm-based fiber tip Fabry-Perot interferometer (FPI) for high-pressure (40 MPa) sensing. By using a fiber tip polishing technique, the thickness of the silica diaphragm could be precisely controlled and the pressure sensitivity of the fabricated FPI sensor was enhanced significantly by reducing the diaphragm thickness; however, the relationship between the pressure sensitivity and diaphragm thickness is not linear. A high sensitivity of -1.436 nm/MPa and a linearity of 0.99124 in hydraulic pressure range of 0 to 40 MPa were demonstrated for a sensor with a diaphragm thickness of 4.63 mu m. The achieved sensitivity was about one order of magnitude higher than the previous results reported on similar fiber tip FPI sensors in the same pressure measurement range. Sensors with a thinner silica diaphragm (i.e., 4.01 and 2.09 mu m) rendered further increased hydraulic pressure sensitivity, but yield a significant nonlinear response. Two geometric models and a finite element method (FEM) were carried out to explain the nonlinear response. The simulation results indicated the formation of cambered internal silica surface during the arc discharge process in the fiber tip FPI sensor fabrication.