A microfluidic-electric package for power MEMS generators

This paper reports the design, fabrication, and measurement results of a compact, multi-fimctional package for air-driven, rotary, electromagnetic MEMS generators. The fully integrated device includes a polymer-based fluidic housing, its associated turbine supported by a small, off-the-shelf, high-speed ball bearing, and a permanent-magnet (PM) generator with electroplated copper windings. The fluidic-electric package has an overall volume of approximately 1.1cm(3), and weighs 1.5g. It withstands pressures up to 85kPa, can support rotational speeds up to 203,000 rpm, and generates an electrical output power of 0.8mW, indicating that this packaged machine is applicable to small, low-power systems.