Polymer-derived ceramic thin-film temperature sensor

被引：37

作者：

Cui, Zaifu ^{[1
,2
,3
]}

Li, Xin ^{[4
]}

Pan, Xiaochuan ^{[1
,2
,3
]}

Chen, Guochun ^{[1
,2
,3
]}

Li, Yali ^{[1
,2
,3
]}

Lin, Ji'an ^{[1
,2
,3
]}

Wu, Chao ^{[1
,2
,3
]}

Liu, Xianlong ^{[1
,2
,3
]}

Yang, Tao ^{[1
,2
,3
]}

Hai, Zhenyin ^{[1
,2
,3
]}

He, Gonghan ^{[1
,2
,3
]}

Chen, Qinnan ^{[1
,2
,3
]}

Sun, Daoheng ^{[1
,2
,3
]}

机构：

[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361102, Peoples R China

[2] Xiamen Univ, Fujian Micro Nano Mfg Engn Technol Res Ctr, Xiamen 361102, Peoples R China

[3] Xiamen Univ, Fujian Engn & Res Ctr Intelligent Sensing & Contr, Xiamen 361102, Peoples R China

[4] Xiamen Univ, Sch Phys Sci & Technol, Xiamen 361005, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2021年 / 332卷

关键词：

Direct writing; Polymer-derived ceramics; Thin film; Temperature sensor; COATINGS;

D O I：

10.1016/j.sna.2021.113038

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In-situ monitoring of machines in harsh environment remains challenging due to lack of high-performance sensors. Most of sensors cannot survive over 600 degrees C even with packaging. In this work, an ultra-thin-film temperature sensor was fabricated based on polymer-derived ceramics (PDCs) via direct-writing for aerospace applications. The sensitive film with thickness of 10 mu m consists of polymer-derived SiCN filled with TiB2, ZrB2 and SiC nano-particles. The resistance-temperature dependence tests of the sensor indicates that the resistance of the PDC thin film decreases monotonically with rising temperature and exhibits good repeatability at temperatures from room temperature to 800 degrees C in the air environment. The fabricated thin-film sensor shows great potential for high temperature applications and the technological routine provides a feasible pathway for structure function integration in aerospace manufacture. (C) 2021 Elsevier B.V. All rights reserved.

引用

页数：7

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