Electrical and optical properties of chemical solution deposited barium hafnate titanate thin films

被引:20
作者
Halder, Sandip [1 ]
Schneller, Theodor [1 ]
Waser, Rainer [2 ]
Majumder, S. B. [3 ]
机构
[1] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech 2, Aachen, Germany
[2] Forschungszentrum Julich, Ctr Nanoelect Informat Technol, Julich, Germany
[3] Indian Inst Technol, Ctr Mat Sci, Kharagpur 721302, W Bengal, India
关键词
barium hafnate titanate; dielectrics; optical properties;
D O I
10.1016/j.tsf.2007.09.041
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated the electrical and optical properties of Ba(HfxTi1-x)O-3 (x = 0, 0.1, 0.2, 0.3, 0.4) (BHT) thin films deposited on platinized silicon and fused quartz substrates. Analyses of the X-ray diffraction patterns reveal that with the increase in Hf contents there is a systematic increase of the lattice constants of BHT films. Irrespective of the measurement frequencies the dielectric constants was found to be systematically decreased, whereas their frequency dispersion was found to be reduced with increasing Hf contents. The leakage current data measured using a metal-insulator-metal configuration reveal that the Schottky emission is the dominant leakage current mechanism in these films. BHT films, deposited on transparent fused quartz substrates, were also characterized in terms of their optical properties. For this purpose the transmittance of the undoped as well as Hf doped barium titanate thin films was measured as a function of wavelength in the range of 290 nm to 800 nm. The transmission spectra were analysed to estimate the wavelength dependence of the refractive indices/extinction coefficients as well as the variation of optical band gap of these films. With the increase of Hf contents, a systematic increase of the band gap [from 3.65 eV (undoped film) to 4.15 eV (40 at.% Hf doped barium titanate film)] was observed. The reduction of the leakage current with increasing hafnium substitution is discussed on the basis of an increasing Schottky barrier height and due to a simultaneous increase in the band gap of the material. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:4970 / 4976
页数:7
相关论文
共 22 条
[1]   Optical constants of evaporated gadolinium oxide [J].
Dakhel, AA .
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2001, 3 (06) :452-454
[2]  
Demkov AA, 2001, PHYS STATUS SOLIDI B, V226, P57, DOI 10.1002/1521-3951(200107)226:1<57::AID-PSSB57>3.0.CO
[3]  
2-L
[4]   Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memories [J].
Dietz, GW ;
Schumacher, M ;
Waser, R ;
Streiffer, SK ;
Basceri, C ;
Kingon, AI .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) :2359-2364
[5]   Relaxor behavior in sol-gel-derived BaZr(0.40)Ti(0.60)O3 thin films [J].
Dixit, A ;
Majumder, SB ;
Katiyar, RS ;
Bhalla, AS .
APPLIED PHYSICS LETTERS, 2003, 82 (16) :2679-2681
[6]   Studies on the relaxor behavior of sol-gel derived Ba(ZrxTi1-x)O3 (0.30≤x≤0.70) thin films [J].
Dixit, A ;
Majumder, SB ;
Katiyar, RS ;
Bhalla, AS .
JOURNAL OF MATERIALS SCIENCE, 2006, 41 (01) :87-96
[7]   Dielectric and tunable properties of BaZrxTi1-xO3 thin films [J].
Dixit, A ;
Majumder, SB ;
Katiyar, RS ;
Bhalla, AS .
FERROELECTRICS LETTERS SECTION, 2005, 32 (5-6) :131-137
[8]  
Fesenko E. G., 1961, SOV PHYS-CRYSTALLOGR, V6, P373
[9]   Fabrication and electrical characterisation of Zr-substituted BaTiO3 thin films [J].
Halder, S ;
Schneller, T ;
Böttger, U ;
Waser, R .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (01) :25-29
[10]   Control of the morphology of CSD-prepared (Ba,Sr)TiO3 thin films [J].
Hoffmann, S ;
Waser, R .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (6-7) :1339-1343