共 10 条
[2]
Chang K., 2016, P IEEE INT C COMP AI
[4]
Ultra-fine Pitch 3D Integration Using Face-to-Face Hybrid Wafer Bonding Combined with a Via-Middle Through-Silicon-Via Process
[J].
2016 IEEE 66TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC),
2016,
:1179-1185
[5]
Ku B. W., 2016, P IEEE INT C COMP AI
[6]
Physical Design Solutions to Tackle FEOL/BEOL Degradation in Gate-level Monolithic 3D ICs
[J].
ISLPED '16: PROCEEDINGS OF THE 2016 INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN,
2016,
:76-81
[8]
Design and CAD Methodologies for Low Power Gate-level Monolithic 3D ICs
[J].
PROCEEDINGS OF THE 2014 IEEE/ACM INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN (ISLPED),
2014,
:171-176
[9]
A novel, wafer-level stacking method for low-chip yield and non-uniform, chip-size wafers for MEMS and 3D SIP applications
[J].
58TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, PROCEEDINGS,
2008,
:314-+
[10]
Suga T., 2017, DIRECT CU CU BONDING, P129