Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process

被引:8
作者
Wang QuanDai [1 ]
Cai XingXing [1 ]
Wang Li [2 ]
Li PengYang [1 ]
Xiao JiMing [1 ]
Li Yan [1 ]
机构
[1] Xian Univ Technol, Sch Mech & Precis Instrument Engn, Xian 710048, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
surface texture; through-mask electrochemical micromachining; mass transfer; ultrasonic stirring; numerical simulation; TRIBOLOGICAL PERFORMANCE; FUNDAMENTAL-ASPECTS; SURFACES; MICROFABRICATION; LUBRICATION; SHAPE;
D O I
10.1007/s11431-017-9156-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical micromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 mu m and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.
引用
收藏
页码:250 / 256
页数:7
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