X-ray topo-tomography studies of linear dislocations in silicon single crystals

被引：14

作者：

Asadchikov, Victor ^{[1
]}

Buzmakov, Alexey ^{[1
]}

Chukhovskii, Felix ^{[1
]}

Dyachkova, Irina ^{[1
]}

Zolotov, Denis ^{[1
]}

Danilewsky, Andreas ^{[2
]}

Baumbach, Tilo ^{[3
,4
]}

Bode, Simon ^{[4
]}

Haaga, Simon ^{[2
,3
]}

Haenschke, Daniel ^{[3
]}

Kabukcuoglu, Merve ^{[2
,3
]}

Balzer, Matthias ^{[5
]}

Caselle, Michele ^{[5
]}

Suvorov, Ernest ^{[6
]}

机构：

[1] FSRC Crystallog & Photon, Moscow, Russia

[2] Inst Geo & Environm Sci, Crystallog, Freiburg, Germany

[3] Karlsruhe Inst Technol, Inst Photon Sci & Synchrotron Radiat, Karlsruhe, Germany

[4] Karlsruhe Inst Technol, Lab Applicat Synchrotron Radiat, Karlsruhe, Germany

[5] Karlsruhe Inst Technol, Inst Data Proc & Elect, Karlsruhe, Germany

[6] RAS, Inst Solid State Phys, Chernogolovka, Moscow Region, Russia

来源：

JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2018年 / 51卷

关键词：

X-ray topo-tomography; polygonal dislocation half-loops; synchrotron facilities; Takagi-Taupin equations; linear dislocations; silicon crystals; DIFFRACTION CONTRAST; DYNAMICAL THEORY; SIMULATION; DEFECTS;

D O I：

10.1107/S160057671801419X

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This article describes complete characterization of the polygonal dislocation half-loops (PDHLs) introduced by scratching and subsequent bending of an Si(111) crystal. The study is based on the X-ray topo-tomography technique using both a conventional laboratory setup and the high-resolution X-ray image-detecting systems at the synchrotron facilities at KIT (Germany) and ESRF (France). Numerical analysis of PDHL images is performed using the Takagi-Taupin equations and the simultaneous algebraic reconstruction technique (SART) tomographic algorithm.

引用

页码：1616 / 1622

页数：7

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