Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

被引：31

作者：

Lin, Pei-Chung ^{[1
]}

Cheng, Chun-Yang ^{[1
]}

Yeh, Jien-Wei ^{[1
]}

Chin, Tsung-Shune ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan

[2] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 40724, Taiwan

来源：

ENTROPY | 2016年 / 18卷 / 08期

关键词：

high-entropy alloys; magnetic sputtering; thin films; magnetic property; electrical resistivity; FREQUENCY FERROMAGNETIC PROPERTIES; ANISOTROPY; INDUCTORS; MICROSTRUCTURE; PERMEABILITY; ALLOYS;

D O I：

10.3390/e18080308

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 degrees C are saturation magnetization 9.13 x 10(5) A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 x 10(3) A/m, and electrical resistivity 3.75 mu Omega.m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor.

引用

页数：9

共 41 条

[11] Structure and soft magnetic properties of Fe-Co-Ni-based multicomponent thin films [J].

Chen, HK ;

Li, SH ;

Duh, JG .

JOURNAL OF ELECTRONIC MATERIALS, 2005, 34 (12) :1480-1483

[12] Fe-Cr-Hf-N and Fe-Cr-Ta-N soft magnetic thin films [J].

Chen, LH ;

Zhu, W ;

Tiefel, TH ;

Jin, S ;

vanDover, RB ;

Korenivski, V .

IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) :3811-3813

[13] Soft magnetic properties of Co-Fe-Zr-B-Al-O films [J].

Chen, LH ;

Chen, HK ;

Hsieh, CT ;

Shih, YH ;

Chen, IG ;

Chen, SY ;

Liu, HP .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (10) :8450-8452

[14] Near-constant resistivity in 4.2-360 K in a B2 Al2.08CoCrFeNi [J].

Chen, Swe-Kai ;

Kao, Yih-Farn .

AIP ADVANCES, 2012, 2 (01)

[15]

Chikazumi, 1964, PHYS MAGNETISM

[16] FERROMAGNETIC PROPERTIES AND SUPERLATTICE FORMATION OF IRON NICKEL ALLOYS .1. [J].

CHIKAZUMI, S .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1950, 5 (05) :327-333

[17] Microstructure, thermophysical and electrical properties in AlxCoCrFeNi (0≤ x≤2) high-entropy alloys [J].

Chou, Hsuan-Ping ;

Chang, Yee-Shyi ;

Chen, Swe-Kai ;

Yeh, Jien-Wei .

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 163 (03) :184-189

[18]

Comstock RX., 1999, INTRO MAGNETISM MAGN, V1st

[19] Coupled Inductors With Crossed Anisotropy CoZrTa/SiO2 Multilayer Cores [J].

Davies, Ryan P. ;

Cheng, Cheng ;

Sturcken, Noah ;

Bailey, William E. ;

Shepard, Kenneth L. .

IEEE TRANSACTIONS ON MAGNETICS, 2013, 49 (07) :4009-4012

[20] Soft ferromagnetic thin films for high frequency applications [J].

Fergen, I ;

Seemann, K ;

von der Weth, A ;

Schüppen, A .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 242 (242-245) :146-151

← 1 2 3 4 5 →