Desorption and Sputtering on Solid Surfaces by Low-Energy Multicharged Ions

被引：4
作者：
Motohashi, K. [1 ]
机构：
[1] Toyo Univ, Fac Sci & Engn, Dept Biomed Engn, Kawagoe, Saitama 3508585, Japan
来源：
XXVI INTERNATIONAL CONFERENCE ON PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS | 2009年 / 194卷
关键词：
HIGHLY-CHARGED IONS; NANO-HILLOCK FORMATION; SI(100) SURFACE; INSULATOR SURFACES; COULOMB EXPLOSION; AL2O3; SURFACES; AL SURFACE; IMPACT; SPECTROSCOPY; PROTONS;
D O I：
10.1088/1742-6596/194/1/012061
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
Desorption and sputtering on solid surfaces interacting with slow multicharged ions were studied by two different experimental methods: time-of-flight secondary ion mass spectrometry (TOF-SIMS) coupled with low-energy ion scattering spectroscopy (LEIS), and optical emission spectroscopy (OES) of secondary particles. Spectra reveal the anisotropic angular dependence of proton emission on an Al surface interacting with Arq+ (q = 8 and 14) ions at the incidence angle of similar to 0.5 degrees (tangential angle to the surface). Simultaneous spectra of a GaN surface, scattering Ar+ ions and scattering protons reveal the kinetic energy distribution of Ar6+ (15 keV, similar to 10 degrees) and the dependence of the protons on the kinetic energy of Ar+. Spectra of secondary particles, conducted on a Ti surface irradiated with Ar3+ ions (30 keV) at normal-incidence angle, reveal the mean velocity < nu(perpendicular to) > of sputtered Ti* substrate atoms perpendicular to the surface, measured by analyzing intensity decay as a function of distance from the surface.
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