Adjusting the Operating Voltage of an Nanoelectromechanical Relay Using Negative Capacitance

被引：29

作者：

Choe, Kihun ^{[1
]}

Shin, Changhwan ^{[1
,2
]}

机构：

[1] Univ Seoul, Dept Elect & Comp Engn, Seoul 02504, South Korea

[2] SK Hynix, Ichon 17336, South Korea

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2017年 / 64卷 / 12期

基金：

新加坡国家研究基金会;

关键词：

Ferroelectrics; nanoelectromechanical (NEM) system; negative capacitance (NC); NEM relay; DEVICES; CIRCUITS;

D O I：

10.1109/TED.2017.2756676

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The operating voltage of a nanoelectromechanical (NEM) relay can be scaled down significantly using negative capacitance (NC), which is a unique property of ferroelectric materials. It has been observed that a ferroelectric capacitor can amplify the internal voltage of a device (higher than the externally applied voltage) by means of the NC effect. In this simulation work, depending on the structural parameters of a ferroelectric capacitor and an NEM relay, an NC + NEM relay (in which the gate electrode of the NEM relay is connected in series to the ferroelectric capacitor) was investigated. As a result, a sub-0.5-V operating voltage is theoretically estimated.

引用

页码：5270 / 5273

页数：4

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