Asymmetric MIM structure formation by PLD technique with metallic nitrides and its SPP excitation and waveguiding characteristics

被引:1
作者
Oshikane, Yasushi [1 ]
Nakano, Motohiro [1 ]
Ogi, Hirotsugu [1 ]
机构
[1] Osaka Univ, Grad Sch Engn, Dept Prec Sci & Technol & Appl Phys, Quantum Measurement & Instrumentat Area, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan
来源
NANOSTRUCTURED THIN FILMS XI | 2018年 / 10731卷
关键词
alternative plasmonic materials; pulsed laser deposition (PLD); titanium nitride (TiN); aluminum nitride (AlN); zirconium nitride (ZrN); surface plasmon; surface plasmon polatiron (SPP); third harmonic; pulsed Nd:YAG laser; X-ray photoelectron microscopy (XPS); X-ray diffraction (XRD); spectrophotometry; asymmetric metal-insulator-metal (MIM) structure; PULSED-LASER DEPOSITION; ALTERNATIVE PLASMONIC MATERIALS; TITANIUM NITRIDE; THIN-FILMS; OPTICAL CHARACTERIZATION; LOW-TEMPERATURE; XPS ANALYSIS; TIN; ZRN; GROWTH;
D O I
10.1117/12.2322091
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Experimental study and simulation analyses have been implemented in creation of an asymmetric metalinsulator-metal (MIM) on surface of glass. All of the metallic layers are composed of metallic nitrides or ceramics. Among recently reported alternative plasmonic materials, titanium nitride (TiN) and zirconium nitride (ZrN) are candidates for the metallic layers because they have plasmonic characteristic in visible region and chemically-stable. On the other hand, aluminum nitride (AlN) is used for the insulating layer because of its transparency, high refractive index, and high thermal conductivity. In this study, thin-film deposition of the ceramics is done by pulsed laser deposition (PLD) with high power UV Nd:YAG laser at 355nm. The PLD targets are hot-pressed pellets of microcrystalline powder. The asymmetric MIM structure is going to be applied to an end of optical fiber probe as an exciter of surface plasmon polariton.
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页数:12
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