Composition dependence of electrooptic property of epitaxial (Pb,La)(Zr,Ti)O3 films

被引:1
作者
Shima, Hiromi [1 ]
Iijima, Takashi [2 ]
Nakajima, Takashi [1 ]
Okamura, Soichiro [1 ]
机构
[1] Tokyo Univ Sci, Fac Sci, Dept Appl Phys, Shinjuku Ku, Tokyo 1628601, Japan
[2] Natl Inst Adv Ind Sci & Technol, Res Ctr Hydrogen Ind Use & Storage, Tsukuba, Ibaraki 3058569, Japan
关键词
Electrooptic effect; Epitaxial film; PLZT; Composition dependence; Zr/Ti; ZIRCONATE-TITANATE FILMS; THIN-FILM;
D O I
10.2109/jcersj2.118.636
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The Zr/Ti ratio dependence of refractive index and electrooptic coefficient of epitaxial (Pb,La)(Zr,Ti)O-3 (PLZT) films were investigated. PLZT films were fabricated on La-doped SrTiO3 (La-STO) substrates by a chemical solution deposition (CSD) method. Optical properties in TE- and TM-modes were measured individually using a prism coupling method. The refractive indexes both in TE- and TM-modes were as large as that of the polycrystalline film, and increased with increasing Ti/(Zr + Ti) ratio. The refractive index in TE-mode was larger than that in TM-mode because the PLZT films received compressive stress from the La-STO substrates due to lattice mismatch. The refractive index in TM-mode almost linearly decreased with increasing applied an electric field while that in TE-mode slightly increased and saturated around at 200 kV/cm. The Pockels coefficient in TM-mode r(33) showed large change for compositions, while that in TE-mode r(13) showed little change. The maximum Pockels coefficient r(c) of 156 pm/V was obtained for the epitaxial PLZT film with Ti/(Zr Ti) ratio of 50%. (C) 2010 The Ceramic Society of Japan. All rights reserved.
引用
收藏
页码:636 / 639
页数:4
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