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Harbin Inst Technol, Micro Nanotechnol Res Ctr, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150080, Peoples R China
Chinese Acad Sci, Inst Chem, Key Lab Colloid Interface & Chem Thermodynam, Beijing Natl Lab Mol Sci, Beijing 100190, Peoples R China Harbin Inst Technol, Micro Nanotechnol Res Ctr, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150080, Peoples R China