Transformation of 2D group-III selenides to ultra-thin nitrides: enabling epitaxy on amorphous substrates

被引:9
作者
Briggs, Natalie [1 ,2 ]
Isolina Preciado, Maria [1 ,3 ]
Lu, Yanfu [1 ]
Wang, Ke [4 ]
Leach, Jacob [5 ]
Li, Xufan [6 ]
Xiao, Kai [6 ]
Subramanian, Shruti [1 ]
Wang, Baoming [7 ]
Haque, Aman [7 ]
Sinnott, Susan [1 ,2 ]
Robinson, Joshua A. [1 ,2 ,8 ]
机构
[1] Penn State Univ, Dept Mat Sci & Engn, Ctr Dimens & Layered Mat 2, University Pk, PA 16802 USA
[2] Penn State Univ, Mat Res Inst, Crystal Consortium 2D, University Pk, PA 16802 USA
[3] Univ Politecn Madrid, Dept Ciencia Mat, ETSI Caminos Canales & Puertos, E-28040 Madrid, Spain
[4] Mat Characterizat Lab, University Pk, PA 16802 USA
[5] KYMA Technol, 8829 Midway West Rd, Raleigh, NC 27617 USA
[6] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, One Bethel Valley Rd, Oak Ridge, TN 37831 USA
[7] Penn State Univ, Dept Mech & Nucl Engn, University Pk, PA 16802 USA
[8] Penn State Univ, Ctr Atomically Thin Multifunct Coatings, University Pk, PA 16802 USA
关键词
2D materials; nitrides; gallium selenide; ammonolysis; epitaxy; GALLIUM NITRIDE; GAN; GASE; NANOSHEETS; GROWTH; HETEROSTRUCTURES;
D O I
10.1088/1361-6528/aae0bb
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The experimental realization of two-dimensional (2D) gallium nitride (GaN) has enabled the exploration of 2D nitride materials beyond boron nitride. Here we demonstrate one possible pathway to realizing ultra-thin nitride layers through a two-step process involving the synthesis of naturally layered, group-III chalcogenides (GIIIC) and subsequent annealing in ammonia (ammonolysis) that leads to an atomic-exchange of the chalcogen and nitrogen species in the 2D-GIIICs. The effect of nitridation differs for gallium and indium selenide, where gallium selenide undergoes structural changes and eventual formation of ultra-thin GaN, while indium selenide layers are primarily etched rather than transformed by nitridation. Further investigation of the resulting GaN films indicates that ultra-thin GaN layers grown on silicon dioxide act as effective 'seed layers' for the growth of 3D GaN on amorphous substrates.
引用
收藏
页数:6
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